The SpeedFam Accu-Flat is a measurement system for the plate and the
polishing pads used in CMP and double side processing (upper and lower).
Quantitative measurements of the degree of flatness on these large surfaces
are realized for effective and efficient quality control of your process.
The length of this system is 31 Inches.
Accu-Flat - Drastically reduces time and operation interpretation to check
and verify the accuracy of the flat working surface of your free-abrasive
or lapping machine, and provide positive measurement of the surface with
the SpeedFam Accu-Flat measuring unit. The Accu-Flat eliminates the need
for straight edges, shim stock and feeler gauges. It is constructed of
light weight, sturdy aluminum and is complete with master setting stand
for automatic continuous positive flatness verification.
Accu-Flat Aluminum Bar w/Handles
(2) Starrett Gauges
Sturdy Felt Lined Wooden Case
*Preliminary Specifications Subject to Verification